MINNEAPOLIS, MINNESOTA USA -- Donaldson Company, Inc. announces an advanced reticle area filter for highly efficient removal of gas-phase organics and other contaminants within lithographic tools. The reticle area filter is smaller than current point-of-use (POU) filter designs for lens purge and optics protection applications, allowing lithography tool managers maximum contamination control of small environments.
Made with activated carbon, the reticle area filter won’t affect the transmission of O2, H2O and relative humidity. The filter is designed for “ultra high purity” specifications with zero particulation and off-gassing requirements.
Reticle Area Filter Applications
- Purging of reticle/illuminator area
- Rapid purging of small areas within the tool
- Removal of non-polar compounds decrease contamination of reticle and tool
- Ultra High purification of nitrogen purge systems
Design Features
- Media can be analyzed to identify contaminants
- Refillable
- Different size filters for many different applications
Cost effective
“A properly designed filter is required to achieve part per billion level output,” said James Empson, Product Manager. “The reticle area filter evolved from our original point-of-use filter. As such, it easily retrofits any current tool and provides ultra high purity filtration performance. When used with in conjunction with our high efficiency, low off-gas membrane dryer, the reticle area filter provides a low-cost alternative to either gettering or catalytic purifiers.”
About Donaldson
Donaldson Company, Inc., headquartered in Minneapolis, Minn., is a leading worldwide provider of filtration systems and replacement parts. Founded in 1915, Donaldson is a technology-driven company committed to satisfying customer needs for filtration solutions through innovative research and development. Donaldson serves customers in the industrial and engine markets including in-plant air cleaning, compressed air and gas purification, power generation, specialty filtration, off-road equipment and trucks. Our 10,000 employees contribute to the company's success at over 30 manufacturing locations around the world. In fiscal year 2004, Donaldson reported sales of more than $1.4 billion and grew earnings for the 15th consecutive year. Donaldson is a member of the S&P MidCap 400 Index and Donaldson shares are traded on the New York Stock Exchange under the symbol DCI. Additional information is available at from the company website.
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