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Which contaminants are Donaldson filters able to remove?
Donaldson filters remove the broadest range of contaminants, including bases such as ammonia, amines, NMP, and acids such as SO2 and H2S, and non-polar organics such as Silanes, organophosphates, hydrocarbons, pthalates and anti-oxidants such as BHT. If you would like information regarding a specific contaminant, please contact us.

How long will Donaldson filters last?
Filter life is dependent upon the amount and type of contaminant being removed from the ambient air. Please contact us regarding your specific contamination control need and airflow requirements, and we will provide you with a filter life expectancy.

What is the difference between filters in a series flow and parallel flow?
Series flow means that the air passes through several filters in order to reach the required level of filtration. Parallel flow means that the air stream is divided and passes once through the filter to reach the required level of filtration. Donaldson’s filtration effectiveness allows the highest level of efficiency in a single pass.

What do I need to know about filter offgassing?
All materials are low offgassing. Donaldson’s chemists and engineering department continuously seek to improve the performance of the materials used in our filters for each semiconductor application.

Why should I be concerned about contaminants other than ammonia?
Ammonia has long been identified as a contaminant in the fab and is easily removed. As technology has progressed, evidence has revealed that NMP, acids, and non-polar organics (to name a few) are also negatively affecting tools and processes, which cause down time and lower yield rates

How does carbon media compare to Donaldson’s ChemCore media?
The highly porous structure of activated carbon remains the most effective material for adsorbing non-polar airborne molecular contaminants problematic in the lithographic environment. The biggest problem with the use of activated carbon is weight and high pressure drop.

ChemCore does not use carbon to filter contaminants. Instead, it introduces active absorbent chemistry into the air stream to control acid and base gases in the lightest weight and lowest pressure drop format. It is an innovative and highly effective alternative to carbon-based filters.

How does Donaldson ensure the quality of its filters before they are shipped?
Donaldson’s quality control procedures include numerous tests that are performed on each filter to ensure that each meets our high internal standards and the level of quality people have come to expect from Donaldson.


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